Quality assurance of novel GaN technologies
Increasing digitalization in industry and private households, electromobility and the increased use of renewable energies are creating a growing demand for efficient and durable high-frequency and power semiconductor components. High-electron mobility transistors (HEMT) based on the wide bandgap semiconductor material gallium nitride (GaN) enable very high switching speeds to be achieved with significantly reduced power losses. The production is based on novel processes for epitaxially grown GaN substrates on silicon, sapphire or silicon carbide with circuit structures and is associated with a correspondingly high need of analysis with respect to process characterization and qualification as well as physical failure analysis. HEMT transistors are exposed to extremely high temperature and voltage loads during electrical operation, which leads to novel failure modes and degradation processes along with the direct semiconductor material used here. These must be identified and controlled in order to meet the application-specific requirements for performance, quality and reliability of III/ V devices.