One of the most modern and largest transmission electron microscopes within Fraunhofer is in the Fraunhofer IMWS: The Titan3 G2 60-300 of the FEI Company.
The microscope, which was purchased thanks to support from the State of Saxony-Anhalt and Fraunhofer-Gesellschaft, has very high imaging quality and supplements the equipment used to date for ultra-high resolution electron microscopy to include analysis options within the atomic range.
To the complete overview of the facilities in the microelectronics area of expertise.