Fraunhofer Institute for Microstructure of Materials and Systems IMWSA new approach that enables the additive 3D production of complex nanoscale materials is ion-assisted deposition under grazing particle incidence. The innovation in the manufacturing process is based on the use of an assist ion source, which can be used in a process unit to produce high-quality, homogeneous and ordered nanomaterials and their heterostructures in three sequential sub-steps. The sub-steps include (i) the ion beam-assisted pre-structuring of a substrate by ion beam erosion, (ii) the control of phase composition and stoichiometry during production by ion-assisted reactive processes, and (iii) the ion-assisted finishing of the geometry of the material by ion beam polishing.
Scientists from the University of Nebraska-Lincoln, the Leibniz Institute for Surface Modification (IOM) and the Fraunhofer Institute for Microstructure of Materials and Systems IMWS are focusing their scientific investigations on the production of metal oxides that are not accessible to other additive 3D processes but are of great importance for applications in sensor technology, photonics, quantum technology, medical and environmental technology in a project funded by the NSF (National Science Foundation) and the DFG (German Research Foundation). As an example substance, heterostructures of ZrO2-MoO3-x are to be researched, which show promising properties for low-loss photonic applications, among other things.
The production of metal oxide heterostructures will be investigated as a function of ion beam parameters such as ion energy, ion beam density, ion incidence angle and ion mass. An innovative concept for spectroscopic in-situ ellipsometry with varying sample position will be used for real-time control. The further development of the manufacturing process will be accompanied by a comprehensive process analysis using electrical and energy-selective mass spectrometric probe measurements, supported by Monte Carlo simulations of mass transport in solids and in the gas phase. The specific structural properties of the materials are to be represented in a modified Thornton diagram as a function of process parameters such as ion bombardment and grazing particle incidence.
The development of a new process for additive 3D manufacturing of complex nanomaterials is based on the synergistic collaboration with complementary expertise in nanofabrication, ion beam technology and process analysis between Dr. Eva Schubert, Professor at the University of Nebraska-Lincoln and Dr. Frank Frost, Group Leader Ion Beam Structuring and Smoothing at the Leibniz Institute for Surface Modification e.V. (IOM) Leipzig. The high-resolution STEM imaging in combination with EDX elemental analysis is carried out by Dr. René Feder, Team Leader Hybrid Systems, Fraunhofer Institute for Microstructure of Materials and Systems IMWS.